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Publication Information
Title
Japanese:
English:
Improvement of ionization yield in sputtered neutral mass spectrometry using pulsed infrared and ultraviolet lasers
Author
Japanese:
Reiko Saito,
圷 晴子
, Jun Asakawa, Yue Zhao, Kei Kiyokawa, Masato Morita, Tetsuo Sakamoto,
藤井 正明
.
English:
Reiko Saito,
Haruko Akutsu
, Jun Asakawa, Yue Zhao, Kei Kiyokawa, Masato Morita, Tetsuo Sakamoto,
Masaaki Fujii
.
Language
English
Journal/Book name
Japanese:
English:
J. Vac. Sci. Technol., B
Volume, Number, Page
Vol. 38 No. 3 pp. 034011-1-5
Published date
Apr. 2020
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
DOI
https://doi.org/10.1116/6.0000088
©2007
Tokyo Institute of Technology All rights reserved.