Improvement of ionization yield in sputtered neutral mass spectrometry using pulsed infrared and ultraviolet lasers

Publication Information

Title

Japanese:
English:	Improvement of ionization yield in sputtered neutral mass spectrometry using pulsed infrared and ultraviolet lasers

Author

Japanese:	Reiko Saito, 圷晴子, Jun Asakawa, Yue Zhao, Kei Kiyokawa, Masato Morita, Tetsuo Sakamoto, 藤井正明.
English:	Reiko Saito, Haruko Akutsu, Jun Asakawa, Yue Zhao, Kei Kiyokawa, Masato Morita, Tetsuo Sakamoto, Masaaki Fujii.

Language

English

Journal/Book name

Japanese:
English:	J. Vac. Sci. Technol., B

Volume, Number, Page

Vol. 38 No. 3 pp. 034011-1-5

Published date

Apr. 2020

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI