Application of Micro-Electro-Mechanical Systems (MEMS) as Sensors: A Review

Publication Information

Title

Japanese:
English:	Application of Micro-Electro-Mechanical Systems (MEMS) as Sensors: A Review

Author

Japanese:	ｱﾊﾏﾄﾞｱﾃｨﾌﾓﾊﾏﾄﾞﾌｧｳｼﾞ, Yaser Sabzehmeidani, 鈴森康一.
English:	Ahmad Athif Mohd Faudzi, Yaser Sabzehmeidani, Koichi Suzumori.

Language

English

Journal/Book name

Japanese:
English:	Journal of Robotics and Mechatronics

Volume, Number, Page

Vol. 32 No. 2 pp. 281-288

Published date

Apr. 20, 2020

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI