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Publication Information
Title
Japanese:
English:
Application of Micro-Electro-Mechanical Systems (MEMS) as Sensors: A Review
Author
Japanese:
アハマド アティフ モハマド ファウジ
, Yaser Sabzehmeidani,
鈴森 康一
.
English:
Ahmad Athif Mohd Faudzi
, Yaser Sabzehmeidani,
Koichi Suzumori
.
Language
English
Journal/Book name
Japanese:
English:
Journal of Robotics and Mechatronics
Volume, Number, Page
Vol. 32 No. 2 pp. 281-288
Published date
Apr. 20, 2020
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
DOI
https://doi.org/10.20965/jrm.2020.p0281
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Tokyo Institute of Technology All rights reserved.