Numerical Analysis of Pattern Shape Deformation in UV Imprint Due to Curing Shrinkage

Publication Information

Title

Japanese:
English:	Numerical Analysis of Pattern Shape Deformation in UV Imprint Due to Curing Shrinkage

Author

Japanese:	大西有希, 山下龍之介, 天谷賢治, Yoshihiko Hirai.
English:	Yuki Onishi, Ryunosuke Yamashita, Kenji Amaya, Yoshihiko Hirai.

Language

English

Journal/Book name

Japanese:
English:	Journal of Photopolymer Science and Technology

Volume, Number, Page

Vol. 33 No. 2 pp. 245--250

Published date

May 2020

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL