Investigation of bonding interface and strain characteristics in surface activated bonding assisted by Si-nano film

Publication Information

Title

Japanese:
English:	Investigation of bonding interface and strain characteristics in surface activated bonding assisted by Si-nano film

Author

Japanese:	Fang Weicheng, 高橋直樹, 大磯義孝, 雨宮智宏, 西山伸彦.
English:	Weicheng Fang, Naoki Takahashi, Yoshitaka Ohiso, Tomohiro Amemiya, Nobuhiko Nishiyama.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 2020

Publisher

Japanese:
English:

Conference name

Japanese:	第67回応用物理学会春季学術講演会
English:

Conference site

Japanese:	東京
English: