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Publication Information
Title
Japanese:
English:
Investigation of bonding interface and strain characteristics in surface activated bonding assisted by Si-nano film
Author
Japanese:
Fang Weicheng
,
高橋 直樹
,
大磯 義孝
,
雨宮 智宏
,
西山 伸彦
.
English:
Weicheng Fang
,
Naoki Takahashi
,
Yoshitaka Ohiso
,
Tomohiro Amemiya
,
Nobuhiko Nishiyama
.
Language
English
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Mar. 2020
Publisher
Japanese:
English:
Conference name
Japanese:
第67回応用物理学会春季学術講演会
English:
Conference site
Japanese:
東京
English:
©2007
Institute of Science Tokyo All rights reserved.