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Title
Japanese:スパッタリングを用いたAlScN膜の形成 
English: 
Author
Japanese: 蔡 松霖, 草深 一樹, 星井 拓也, 若林 整, 筒井 一生, 角嶋 邦之.  
English: 蔡 松霖, Kazuki Kusafuka, Takuya Hoshii, Hitoshi Wakabayashi, KAZUO TSUTSUI, Kuniyuki KAKUSHIMA.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Sept. 2019 
Publisher
Japanese: 
English: 
Conference name
Japanese:第80回応用物理学会秋季学術講演会 
English: 
Conference site
Japanese:北海道 
English: 

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