スパッタ法と硫黄雰囲気アニールで成膜した高いホール効果移動度を持つ層状ZrS2膜

Publication Information

Title

Japanese:	スパッタ法と硫黄雰囲気アニールで成膜した高いホール効果移動度を持つ層状ZrS2膜
English:

Author

Japanese:	濱田昌也, 松浦賢太朗, 宗田伊理也, 星井拓也, 角嶋邦之, 筒井一生, 若林整.
English:	Masaya Hamada, Kentaro Matsuura, Iriya Muneta, Takuya Hoshii, Kuniyuki KAKUSHIMA, KAZUO TSUTSUI, Hitoshi Wakabayashi.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 2019

Publisher

Japanese:
English:

Conference name

Japanese:	第80回応用物理学会秋季学術講演会
English:

Conference site

Japanese:	北海道
English: