スパッタMoS2膜のSF6プラズマ処理によるシート抵抗低減

Publication Information

Title

Japanese:	スパッタMoS2膜のSF6プラズマ処理によるシート抵抗低減
English:

Author

Japanese:	堀口大河, 濱田拓也, 辰巳哲也, 冨谷茂隆, 星井拓也, 角嶋邦之, 筒井一生, 若林整.
English:	Taiga Horiguchi, Takuya Hamada, Tetsuya Tatsumi, Shigetaka Tomiya, Takuya Hoshii, Kuniyuki KAKUSHIMA, KAZUO TSUTSUI, Hitoshi Wakabayashi.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 2019

Publisher

Japanese:
English:

Conference name

Japanese:	第80回応用物理学会秋季学術講演会
English:

Conference site

Japanese:	北海道
English: