Formation of Mo2C Electrodes using Stacked Sputtering Process for Thermally Stable SiC Schottky Barrier Diodes

Publication Information

Title

Japanese:
English:	Formation of Mo2C Electrodes using Stacked Sputtering Process for Thermally Stable SiC Schottky Barrier Diodes

Author

Japanese:	角嶋邦之, 鈴木貴志, 星井拓也, 宗田伊理也, 若林整, 岩井洋, Aoki Y., 筒井一生.
English:	K. Kakushima, T. Suzuki, T. Hoshii, I. Muneta, H. Wakabayashi, HIROSHI IWAI, Y. Aoki,H. Nohira Aoki, KAZUO TSUTSUI.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

June 1, 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Int. Workshop on Junction Technology (IWJT2017)

Conference site

Japanese:
English:	Kyoto