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Title
Japanese: 
English:Determination of arbitrary EEDF of atmospheric-pressure plasma by OES continuum emission spectrum analysis 
Author
Japanese: Van Der Gaag Thijs, 赤塚 洋.  
English: Thijs Van Der Gaag, Hiroshi Akatsuka.  
Language English 
Journal/Book name
Japanese:2020年第81回応用物理学会秋季学術講演会講演予稿集 
English:Extended Abstracts of the 81st JSAP Autumn Meeting, 2020 
Volume, Number, Page         p. 07-065
Published date Aug. 26, 2020 
Publisher
Japanese:公益社団法人 応用物理学会 
English:Japan Society of Applied Physics 
Conference name
Japanese:2020年第81回応用物理学会秋季学術講演会 
English:The 81st JSAP Autumn Meeting, 2020 
Conference site
Japanese: 
English: 
Official URL https://confit.atlas.jp/guide/event/jsap2020a2/subject/11a-Z03-3/tables?cryptoId=
 
Abstract New and emerging fields that use atmospheric-pressure non-equilibrium plasma require accessible and easy-to-use diagnostics tools. In this work a new method is presented that is capable of determining arbitrary EEDF from OES measurement. For this, the continuum spectrum is used, which is mostly dominated by neutral bremsstrahlung. The neutral bremsstrahlung emission can be related to the EEDF through an integral equation, from which the EEDF can be obtained by machine learning. This machine learning scheme has been improving steadily and is currently capable of determining detailed EEDF from a realistic OES measurement range with a calculation time in the order of several minutes only. The method presented can potentially become a convenient way of determining arbitrary EEDF in atmospheric-pressure plasma.

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