TixOy薄膜の一軸加圧熱処理による固相エピタキシーと構造･物性評価

Publication Information

Title

Japanese:	TixOy薄膜の一軸加圧熱処理による固相エピタキシーと構造･物性評価
English:	Solid-phase epitaxy, structural and property characterization of titanium oxide thin films by uniaxial compressive annealing

Author

Japanese:	生田貴大, 堀松芳樹, 金子智, 松田晃史, 吉本護.
English:	Takahiro Ikuta, Yoshiki Horimatsu, Satoru Kaneko, Akifumi Matsuda, MAMORU YOSHIMOTO.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Feb. 28, 2020

Publisher

Japanese:	応用物理学会
English:	The Japan Society of Applied Physics

Conference name

Japanese:	第67回応用物理学会春季学術講演会
English:	The 67th JSAP Spring Meeting 2020

Conference site

Japanese:	東京都
English:	Tokyo

Official URL