一軸加圧熱処理による酸化チタン薄膜の固相結晶化と光学･導電特性変化

Publication Information

Title

Japanese:	一軸加圧熱処理による酸化チタン薄膜の固相結晶化と光学･導電特性変化
English:	Solid state crystallization of titanium oxide thin films, and modification of their optical and electric properties by post-depositional uniaxial compressive annealing

Author

Japanese:	生田貴大, 久富翔平, 大賀友瑛, 金子智, 松田晃史, 吉本護.
English:	Takahiro Ikuta, Shohei Hisatomi, Tomoaki Oga, Satoru Kaneko, Akifumi Matsuda, MAMORU YOSHIMOTO.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Aug. 26, 2020

Publisher

Japanese:	応用物理学会
English:	The Japan Society of Applied Physics

Conference name

Japanese:	第81回応用物理学会秋季学術講演会
English:	The 81st JSAP Autumn Meeting 2020

Conference site

Japanese:	京都市
English:	Kyoto

Official URL