Surface morphology change of protective film on collector mirror related to implantation of Sn emitted from laser produced plasma in EUV light source

Publication Information

Title

Japanese:
English:	Surface morphology change of protective film on collector mirror related to implantation of Sn emitted from laser produced plasma in EUV light source

Author

Japanese:	本田能之, 柳田達哉, 白石裕, 森田昌幸, 安藤正彦, 戸室啓明, 松田晃史, 吉本護.
English:	Yoshiyuki Honda, Tatsuya Yanagida, Yutaka Shiraishi, Masayuki Morita, Masahiko Andou, Hiroaki Tomuro, Akifumi Matsuda, Mamoru Yoshimoto.

Language

English

Journal/Book name

Japanese:
English:	Applied Physics Express

Volume, Number, Page

Volume 13 Number 11

Published date

Oct. 15, 2020

Publisher

Japanese:
English:	IOP Publishing

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI