ABH damping of monolithic silica glass cantilever by structural and material modification using fs laser micromachining

Publication Information

Title

Japanese:
English:	ABH damping of monolithic silica glass cantilever by structural and material modification using fs laser micromachining

Author

Japanese:	富田夏奈, 岸哲生, 矢野哲司, Pieter Vlugter, Yves Bellouard.
English:	Kana Tomita, Tetsuo Kishi, Tetsuji Yano, Pieter Vlugter, Yves Bellouard.

Language

English

Journal/Book name

Japanese:
English:	International Journal of Applied Glass Science

Volume, Number, Page

Vol. 12 Issue 1 pp. 36-45

Published date

Dec. 3, 2020

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: