Conversion of Oxide Film Deposition Process: From Thermal Decomposition to Chemical Reaction Using Readily Available Metal Salts

Publication Information

Title

Japanese:
English:	Conversion of Oxide Film Deposition Process: From Thermal Decomposition to Chemical Reaction Using Readily Available Metal Salts

Author

Japanese:	久保田雄太, 片柳雄大, 松下伸広.
English:	Yuta Kubota, Yuta Katayanagi, Nobuhiro Matsushita.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Dec. 9, 2020

Publisher

Japanese:
English:

Conference name

Japanese:
English:	MRM Forum 2020

Conference site

Japanese:
English:	Yokohama