A High Resolution Single Gold Proof-Mass CMOS-MEMS Accelerometer

Publication Information

Title

Japanese:
English:	A High Resolution Single Gold Proof-Mass CMOS-MEMS Accelerometer

Author

Japanese:	市川崇志, 柴田滉平, 古賀達也, 町田克之, 飯田慎一, 石原昇, 益一哉, 伊藤浩之.
English:	Takashi Ichikawa, Kohei Shibata, Tatsuya Koga, Katsuyuki Machida, Shinichi Iida, Noboru Ishihara, Kazuya Masu, Hiroyuki Ito.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 2020

Publisher

Japanese:
English:

Conference name

Japanese:
English:	International Conference on Solid State Devices and Materials

Conference site

Japanese:
English: