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Publication Information
Title
Japanese:
English:
A High Resolution Single Gold Proof-Mass CMOS-MEMS Accelerometer
Author
Japanese:
市川 崇志
,
柴田 滉平
,
古賀 達也
,
町田 克之
,
飯田 慎一
,
石原 昇
,
益 一哉
,
伊藤 浩之
.
English:
Takashi Ichikawa
,
Kohei Shibata
,
Tatsuya Koga
,
Katsuyuki Machida
,
Shinichi Iida
,
Noboru Ishihara
,
Kazuya Masu
,
Hiroyuki Ito
.
Language
English
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Sept. 2020
Publisher
Japanese:
English:
Conference name
Japanese:
English:
International Conference on Solid State Devices and Materials
Conference site
Japanese:
English:
©2007
Institute of Science Tokyo All rights reserved.