Japanese
Home
Search
Horizontal Search
Publication Search
( Advanced Search )
Patent Search
( Advanced Search )
Research Highlight Search
( Advanced Search )
Researcher Search
Search by Organization
Support
FAQ
T2R2 User Registration
Doctoral thesis registration
Support/Contact
About T2R2
What's T2R2?
Operation Guidance
Leaflets
About file disclosure
Related Links
Tokyo Tech
STAR Search
NII IR Program
Home
>
Help
Publication Information
Title
Japanese:
English:
A 100-nG/√Hz-Level Single Au Proof-Mass 3-Axis MEMS Accelerometer with Pillar-Shaped electrodes
Author
Japanese:
市川 崇志
,
渥美 賢
,
古賀 達也
,
山根 大輔
,
飯田 慎一
,
伊藤 浩之
,
石原 昇
,
町田 克之
,
益 一哉
.
English:
Takashi Ichikawa
,
Ken Atsumi
,
Tatsuya Koga
,
Daisuke Yamane
,
Shin-ichi Iida
,
Hiroyuki Ito
,
Noboru Ishihara
,
Katsuyuki Machida
,
Kazuya Masu
.
Language
English
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
June 2020
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Design, Test, Integration & Packaging of MEMS/MOEMS
Conference site
Japanese:
English:
©2007
Tokyo Institute of Technology All rights reserved.