Au錘一軸MEMS加速度センサの差動容量型電極構造の検討

Publication Information

Title

Japanese:	Au錘一軸MEMS加速度センサの差動容量型電極構造の検討
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Author

Japanese:	内山晃宏, 市川崇志, 古賀達也, 町田克之, 益一哉, 石原昇, 飯田慎一, 伊藤浩之.
English:	Akihiro Uchiyama, Takasi Itikawa, Sayaka Koga, Katsuyuki Machida, Kazuya Masu, Noboru Ishihara, Shinichi Iida, Hiroyuki Ito.

Language

Japanese

Journal/Book name

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Volume, Number, Page

Published date

Oct. 2020

Publisher

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Conference name

Japanese:	第12回集積化MEMSシンポジウム
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Conference site

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