CMOS プロセスを利用したSi 導波路型反射率可変ミラーの作製と評価

Publication Information

Title

Japanese:	CMOS プロセスを利用したSi 導波路型反射率可変ミラーの作製と評価
English:	Evaluation of variable reflectance mirror using Si waveguide fabricated by CMOS process

Author

Japanese:	槇原豊, Moataz Eissa, 御手洗拓矢, 雨宮智宏, 西山伸彦, 庄司雄哉, 鈴木恵治郎, 鴻池遼太郎, 岡野誠, 池田和浩, 水本哲弥.
English:	Yutaka Makihara, Moataz Eissa, Takuya Mitarai, Tomohiro Amemiya, Nobuhiko Nishiyama, Yuya Shoji, Keijiro Suzuki, Ryotaro Konoike, Makoto Okano, Kazuhiro Ikeda, Tetsuya Mizumoto.

Language

Japanese

Journal/Book name

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Volume, Number, Page

Published date

Sept. 2020

Publisher

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Conference name

Japanese:	2020年電子情報通信学会ソサイエティ大会
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