Numerical analysis of pattern shape deformation in UV imprint considering thermal deformation with UV shrinkage and curing

Publication Information

Title

Japanese:
English:	Numerical analysis of pattern shape deformation in UV imprint considering thermal deformation with UV shrinkage and curing

Author

Japanese:	大西有希, 山下龍之介, 天谷賢治, Yoshihiko Hirai.
English:	Yuki Onishi, Ryunosuke Yamashita, Kenji Amaya, Yoshihiko Hirai.

Language

English

Journal/Book name

Japanese:
English:	Journal of Vacuum Science & Technology B

Volume, Number, Page

Published date

2021

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL