Structural and Mechanical Properties of a-BCN Films prepared by Arc-Sputtering Hybrid Process

Publication Information

Title

Japanese:
English:	Structural and Mechanical Properties of a-BCN Films prepared by Arc-Sputtering Hybrid Process

Author

Japanese:	平田祐樹, 竹内亮大郎, 谷口紘章, 河越雅雄, 岩本喜直, 吉里樹人, 赤坂大樹, 大竹尚登.
English:	Yuki Hirata, Ryotaro Takeuchi, Hiroyuki Taniguchi, Masao Kawagoe, Yoshinao Iwamoto, Mikito Yoshizato, Hiroki Akasaka, NAOTO OHTAKE.

Language

English

Journal/Book name

Japanese:
English:	Materials

Volume, Number, Page

vol. 14 2300 1-18

Published date

Feb. 2021

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI