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Title
Japanese:シリコーンオイルを用いた液冷により温度制御した積層型圧電素子の高周波駆動時の変位特性 
English: 
Author
Japanese: 西田莉那, 鍾建朋, 進士忠彦.  
English: Rina Nishida, Jianpeng Zhong, TADAHIKO SHINSHI.  
Language Japanese 
Journal/Book name
Japanese:2021年度精密工学会春季大会学術講演会講演論文集 
English: 
Volume, Number, Page         pp. 440-441
Published date Mar. 16, 2021 
Publisher
Japanese: 
English:精密工学会 
Conference name
Japanese:2021年度精密工学会春季大会学術講演会 
English: 
Conference site
Japanese: 
English: 

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