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Title
Japanese: 
English:Effective Young’s Modulus of Elelectrodeposited Gold for Design of MEMS Accelerometers 
Author
Japanese: Chang Tso-Fu Mark, 中島 英亮, 陳 君怡, 山根 大輔, 小西 敏文, 伊藤 浩之, 町田 克之, 益 一哉, Hiroshi Toshiyoshi, 曽根 正人.  
English: Tso-Fu Mark Chang, Hideaki Nakajima, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Hiroshi Toshiyoshi, Masato Sone.  
Language English 
Journal/Book name
Japanese: 
English:Advances in Microelectronics: Reviews 
Volume, Number, Page Vol. 3       
Published date Apr. 1, 2021 
Publisher
Japanese: 
English:IFSA PUBLISHING, S.L. 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 

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