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Title
Japanese:冷却水を必要としないマグネトロンスパッタカソード 
English: 
Author
Japanese: 春本高志.  
English: Takashi HARUMOTO.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Nov. 17, 2020 
Publisher
Japanese: 
English: 
Conference name
Japanese:JST新技術説明会（東京工業大学） 
English: 
Conference site
Japanese: 
English: 

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