Selective fabrication of Ca2NH and CaNH epitaxial thin films using magnetron sputtering system

Publication Information

Title

Japanese:
English:	Selective fabrication of Ca2NH and CaNH epitaxial thin films using magnetron sputtering system

Author

Japanese:	CHON Seoungmin, 清水亮太, Yuki Sugisawa, 小林成, 西尾和記, Daiichiro Sekiba, 一杉太郎.
English:	Seoungmin Chon, Ryota Shimizu, Yuki Sugisawa, Shigeru Kobayashi, Kazunori Nishio, Daiichiro Sekiba, Taro Hitosugi.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

June 2, 2021

Publisher

Japanese:
English:

Conference name

Japanese:
English:	European Materials Research Society Spring Meeting 2021

Conference site

Japanese:
English: