Effect of Soft X-ray Irradiation on Film Properties of a Hydrogenated Si-Containing DLC Film

Publication Information

Title

Japanese:	Effect of Soft X-ray Irradiation on Film Properties of a Hydrogenated Si-Containing DLC Film
English:	Effect of Soft X-ray Irradiation on Film Properties of a Hydrogenated Si-Containing DLC Film

Author

Japanese:	神田一浩, Ryo Imai, Shotaro Tanaka, Shuto Suzuki, 新部正人, 長谷川孝行, 鈴木常生, 赤坂大樹.
English:	Kazuhiro Kanda, Ryo Imai, Shotaro Tanaka, Shuto Suzuki, Masahito Niibe, Takayuki Hasegawa, Tsuneo Suzuki, Hiroki Akasaka.

Language

English

Journal/Book name

Japanese:	Materials
English:	Materials

Volume, Number, Page

Vol. 14 pp. 924

Published date

Feb. 15, 2021

Publisher

Japanese:	MDPI
English:	MDPI

Conference name

Japanese:
English:

Conference site

Japanese:
English: