Preparation of near-1-μm-thick {100}-oriented epitaxial Y-doped HfO2 ferroelectric films on (100)Si substrates by an RF magnetron sputtering method

Publication Information

Title

Japanese:
English:	Preparation of near-1-μm-thick {100}-oriented epitaxial Y-doped HfO2 ferroelectric films on (100)Si substrates by an RF magnetron sputtering method

Author

Japanese:	志村礼司郎, 三村和仙, 清水荘雄, Yoshitomo Tanaka, Yukari Inoue, 舟窪浩.
English:	Reijiro Shimura, Takanori Mimura, Takao Shimizu, Yoshitomo Tanaka, Yukari Inoue, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	J.Ceram. Soc. Jpn

Volume, Number, Page

vol. 128 no. 8 pp. 539-543

Published date

Aug. 2020

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI