Composition Dependence of Crystal Structures and Electrical Properties of Ca-Mg-Si Films Prepared by Sputtering

Publication Information

Title

Japanese:
English:	Composition Dependence of Crystal Structures and Electrical Properties of Ca-Mg-Si Films Prepared by Sputtering

Author

Japanese:	片桐淳生, 上原睦雄, 黒川満央, 秋山賢輔, 清水荘雄, 松島正明, 内田寛, 木村好里, 舟窪浩.
English:	Atsuo Katagiri, Mutsuo Uehara, Mao Kurokawa, Kensuke Akiyama, Takao Shimizu, Masaaki Matsushima, Hiroshi Uchida, Yoshisato Kimura, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	Journal of ELECTRONIC MATERIALS

Volume, Number, Page

vol. 49 no. 12 pp. 7509-7517

Published date

Oct. 2020

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI