Solid-phase epitaxial crystallization of β-Ga2O3 thin film by KrF excimer laser irradiation from backside of NiO (111)-buffered α-Al2O3 (0001) substrate at room temperature

Publication Information

Title

Japanese:
English:	Solid-phase epitaxial crystallization of β-Ga₂O₃ thin film by KrF excimer laser irradiation from backside of NiO (111)-buffered α-Al₂O₃ (0001) substrate at room temperature

Author

Japanese:	森田公之, 松島拓海, 中村稀星, 金子健太, 金子智, 松田晃史, 吉本護.
English:	Hiroyuki Morita, Takumi Matsushima, Kisho Nakamura, Kenta Kaneko, Satoru Kaneko, Akifumi Matsuda, Mamoru Yoshimoto.

Language

English

Journal/Book name

Japanese:
English:	Journal of Vacuum Science & Technology A

Volume, Number, Page

Volume 39 Issue 4 043414

Published date

June 3, 2021

Publisher

Japanese:
English:	AIP Publishing

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI