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Title
Japanese: 
English:Preparation of 1 μm-thick Y-doped HfO2 ferroelectric films on (111)Pt/TiOx/SiO2/(001)Si substrates by a sputtering method and their ferroelectric and piezoelectric properties 
Author
Japanese: 志村 礼司郎, 三村 和仙, 舘山 明紀, 清水 荘雄, 山田 智明, 舟窪 浩.  
English: Reijiro Shimura, Takanori Mimura, Akinori Tateyama, Takao Shimizu, Tomoaki Yamada, Hiroshi Funakubo.  
Language English 
Journal/Book name
Japanese: 
English:Jpn. J. Appl. Phys. 
Volume, Number, Page vol. 60        pp. 031009
Published date Mar. 2021 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
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DOI https://doi.org/10.35848/1347-4065/abe72e

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