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Title
Japanese:反応速度論に基づくUV硬化収縮と熱変形を考慮したUVインプリントの形状変形解析 
English:Shape Deformation Analysis of UV Imprint Considering UV Curing/Shrinkage and Thermal Deformation Based on Reaction Kinetics 
Author
Japanese: 大西有希, 山下龍之介, 天谷賢治, 平井義彦.  
English: Yuki Onishi, Ryunosuke Yamashita, Kenji Amaya, Yoshihiko Hirai.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date May 28, 2021 
Publisher
Japanese: 
English: 
Conference name
Japanese:第26回計算工学講演会 
English: 
Conference site
Japanese: 
English: 

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