Interface engineering of BEOL compatible ferroelectric Y:HfO2 device for enhanced endurance

Publication Information

Title

Japanese:
English:	Interface engineering of BEOL compatible ferroelectric Y:HfO2 device for enhanced endurance

Author

Japanese:	モリナレイエスホエル, 三村和仙, Y. Nakamura, 清水荘雄, 舟窪浩, I. Fujiwara, 星井拓也, 大見俊一郎, 堀敦, 若林整, K. Tsutsui, 角嶋邦之.
English:	J. Molina, T. Mimura, Y. Nakamura, T. Shimizu, H. Funakubo, I. Fujiwara, T. Hoshii, S. Ohmi, A. Hori, H. Wakabayashi, K. Tsutsui, K. Kakushima.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

May 17, 2020

Publisher

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English:

Conference name

Japanese:
English:	2020 IMW (The 12th International Memory Workshop)

Conference site

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English: