Resin Deformation Analysis in UV Imprint Considering UV Shrinkage, Thermal Deformation, and Thermochemical Kinetics

Publication Information

Title

Japanese:
English:	Resin Deformation Analysis in UV Imprint Considering UV Shrinkage, Thermal Deformation, and Thermochemical Kinetics

Author

Japanese:	大西有希, 山下龍之介, 天谷賢治, Yoshihiko Hirai.
English:	Yuki Onishi, Ryunosuke Yamashita, Kenji Amaya, Yoshihiko Hirai.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

June 16, 2021

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The 38th International Conference of Photopolymer Science and Technology (ICPST-38)

Conference site

Japanese:
English: