Deposition phenomena investigation of DLC films on inner walls of circular metal tubes by nanopulse plasma CVD

Publication Information

Title

Japanese:
English:	Deposition phenomena investigation of DLC films on inner walls of circular metal tubes by nanopulse plasma CVD

Author

Japanese:	岩本喜直, 平田祐樹, 中川勝瑛, 髙村瞭太, 赤坂大樹, 大竹尚登.
English:	Yoshinao Iwamoto, Yuki Hirata, Masaaki Nakagawa, Ryota Takamura, Hiroki Akasaka, Naoto Ohtake.

Language

English

Journal/Book name

Japanese:
English:	Abstract of The 14th International Conference on New Diamond and Nano Carbons (NDNC2020/2021)

Volume, Number, Page

7A-19

Published date

June 7, 2021

Publisher

Japanese:
English:	NDNC2020 COMMITTEE

Conference name

Japanese:
English:	The 14th International Conference on New Diamond and Nano Carbons (NDNC2020/2021)

Conference site

Japanese:
English: