Thickness Scaling on Ferroelectric Al0.8Sc0.2N Films

Publication Information

Title

Japanese:
English:	Thickness Scaling on Ferroelectric Al0.8Sc0.2N Films

Author

Japanese:	Sunglin Tsai, 星井拓也, 若林整, 筒井一生, 角嶋邦之.
English:	Sunglin Tsai, Takuya Hoshii, Hitoshi Wakabayashi, Kazuo Tsutsui, Kuniyuki Kakushima.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 2020

Publisher

Japanese:
English:

Conference name

Japanese:
English:	International Conference of Solid State Devices and Materials (SSDM) 2020

Conference site

Japanese:
English: