Surface Modification Using Assisting Electrodes in Wire Electrical Discharge Machining for Silicon Wafer Preparation

Publication Information

Title

Japanese:
English:	Surface Modification Using Assisting Electrodes in Wire Electrical Discharge Machining for Silicon Wafer Preparation

Author

Japanese:	Chunliang Kuo, Yupang Nien, Anchun Chiang, 平田敦.
English:	Chunliang Kuo, Yupang Nien, Anchun Chiang, ATSUSHI HIRATA.

Language

English

Journal/Book name

Japanese:
English:	Materials

Volume, Number, Page

Vol. 14 p. 1355

Published date

Mar. 11, 2021

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: