Home >

news Help

Publication Information


Title
Japanese: 
English:Estimating electron temperature and density using improved collisional-radiative model in high-density RF argon plasma 
Author
Japanese: 堀田 大貴, 桑原 大介, 赤塚 洋, 篠原 俊二郎.  
English: H. Horita, D. Kuwahara, H. Akatsuka, S. Shinohara.  
Language English 
Journal/Book name
Japanese: 
English:AIP Advances 
Volume, Number, Page Vol. 11        075226
Published date July 29, 2021 
Publisher
Japanese: 
English:AIP Publishing 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 
Official URL https://aip.scitation.org/doi/10.1063/5.0050215
 
DOI https://doi.org/10.1063/5.0050215
Abstract It is crucial to measure the electron density (ne) and temperature (Te) for applications such as developing small helicon sources in plasma thrusters. Hence, this study developed a method based on an optical emission spectroscopic (OES) measurement without disturbance or contamination for helicon plasma produced using argon gas. The argon collisional-radiative (CR) model was used to describe the excitation number density in plasma as a function of ne and Te. Each number density ratio was surveyed as a function of ne and Te. From these results, contours of two number densities, i.e., two excitation energy levels, were drawn on an ne–Te plane. By applying various contour pairs, ne and Te were determined from the intersection point of two contours whose values were taken from the experimental intensities. Finally, we compared the new OES measurements with the CR model for various intensity ratios and found a way to select a valid intensity ratio that is in good agreement with the ne and Te derived by the probe method.

©2007 Tokyo Institute of Technology All rights reserved.