Mechanical Property of Gold Micro-Cantilevers for Application in Microelectronics and the Sample Geometry Effect

Publication Information

Title

Japanese:
English:	Mechanical Property of Gold Micro-Cantilevers for Application in Microelectronics and the Sample Geometry Effect

Author

Japanese:	藤田一矢, 鈴木康介, 陳君怡, Chang Tso-Fu Mark, 山根大輔, 伊藤浩之, 町田克之, 益一哉, 曽根正人.
English:	Kazuya Fujita, Kosuke Suzuki, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 2021

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Micro and Nano Engineering Conference 2021 (MNE2021)

Conference site

Japanese:
English:	Turin