Design and precision tracking control of a high-bandwidth fast steering mirror for laser beam machining

Publication Information

Title

Japanese:
English:	Design and precision tracking control of a high-bandwidth fast steering mirror for laser beam machining

Author

Japanese:	鍾建朋, 西田莉那, 進士忠彦.
English:	Jianpeng Zhong, Rina Nishida, Tadahiko Shinshi.

Language

English

Journal/Book name

Japanese:
English:	Precision Engineering

Volume, Number, Page

Vol. 73（2022） pp. 128-139

Published date

Sept. 7, 2021

Publisher

Japanese:
English:	Elsevier

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI