対向ターゲット式スパッタ法による高周波動作用CoZrO 薄膜の作製

Publication Information

Title

Japanese:	対向ターゲット式スパッタ法による高周波動作用CoZrO 薄膜の作製
English:	CoZrO nanogranular films for high frequency operation prepared by facing targets sputtering

Author

Japanese:	河原和馬, 金子忠幸, 安田智貴, 棚瀬純平, 高村陽太, 藤崎敬介, 中川茂樹.
English:	K. Kawahara, T. Kaneko, T. Yasuda, J. Tanase, Y. Takamura, K. Fujisaki, S. Nakagawa.

Language

Japanese

Journal/Book name

Japanese:	第45 回日本磁気学会学術講演概要集
English:

Volume, Number, Page

02pC-4

Published date

Sept. 2, 2021

Publisher

Japanese:
English:

Conference name

Japanese:	第45回日本磁気学会学術講演会
English:	The 45th Annual Conference on MAGNETICS in Japan

Conference site

Japanese:	日本
English:	Japan

Official URL