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Publication Information
Title
Japanese:
English:
Distribution of trace impurities in micro volumes and analysis of concentration using laser sputtered neutral mass spectrometry
Author
Japanese:
圷 晴子
, Reiko Saito, Jun Asakawa, Kei Kiyokawa, Masato Morita, Tetsuo Sakamoto,
藤井 正明
.
English:
Haruko Akutsu
, Reiko Saito, Jun Asakawa, Kei Kiyokawa, Masato Morita, Tetsuo Sakamoto,
Masaaki Fujii
.
Language
English
Journal/Book name
Japanese:
English:
Journal of Vacuum Science & Technology B
Volume, Number, Page
Vol. 39 Issue 6
Published date
Dec. 6, 2021
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
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Tokyo Institute of Technology All rights reserved.