Distribution of trace impurities in micro volumes and analysis of concentration using laser sputtered neutral mass spectrometry

Publication Information

Title

Japanese:
English:	Distribution of trace impurities in micro volumes and analysis of concentration using laser sputtered neutral mass spectrometry

Author

Japanese:	圷晴子, Reiko Saito, Jun Asakawa, Kei Kiyokawa, Masato Morita, Tetsuo Sakamoto, 藤井正明.
English:	Haruko Akutsu, Reiko Saito, Jun Asakawa, Kei Kiyokawa, Masato Morita, Tetsuo Sakamoto, Masaaki Fujii.

Language

English

Journal/Book name

Japanese:
English:	Journal of Vacuum Science & Technology B

Volume, Number, Page

Vol. 39 Issue 6

Published date

Dec. 6, 2021

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: