Micro-Mechanical Property of Single Crystal Gold for Applications in Microelectronics

Publication Information

Title

Japanese:
English:	Micro-Mechanical Property of Single Crystal Gold for Applications in Microelectronics

Author

Japanese:	藤田一矢, 鈴木康介, 陳君怡, Chang Tso-Fu Mark, 伊藤浩之, 町田克之, 益一哉, 曽根正人.
English:	Kazuya Fujita, Kosuke Suzuki, Chun-Yi Chen, Tso-Fu Mark Chang, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone.

Language

English

Journal/Book name

Japanese:
English:	TACT2021 International Thin Films Conference

Volume, Number, Page

Published date

Nov. 15, 2021

Publisher

Japanese:
English:

Conference name

Japanese:
English:	TACT2021 International Thin Films Conference

Conference site

Japanese:
English: