大気圧プラズマCVDの大面積化に向けたシャワーヘッド型マルチガスプラズマ装置の開発

Publication Information

Title

Japanese:	大気圧プラズマCVDの大面積化に向けたシャワーヘッド型マルチガスプラズマ装置の開発
English:	Development of shower head type multi-gas plasma source for large area atmospheric plasma CVD

Author

Japanese:	野口剛, 山崎顕一, 末永祐磨, 安井祐之, 末松妃菜子, 沖野晃俊.
English:	Tsuyoshi Noguchi, Kenichi Yamazaki, Yuma Suenaga, Hiroyuki Yasui, Hinako Suematsu, AKITOSHI OKINO.

Language

Japanese

Journal/Book name

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English:

Volume, Number, Page

Published date

Dec. 3, 2021

Publisher

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Conference name

Japanese:	放電学会年次大会
English:

Conference site

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