MEMSデバイスへの応⽤に向けた⾦ニッケル合⾦の微⼩機械的特性 の評価

Publication Information

Title

Japanese:	MEMSデバイスへの応⽤に向けた⾦ニッケル合⾦の微⼩機械的特性の評価
English:

Author

Japanese:	秋⼭拓海, CHIENYu-An, Chun-Yi Chen, Tso-Fu Chang, 伊藤浩之, 町⽥克之, 三宅美博, 曽根正⼈.
English:	Takumi Akiyama, Yu-An Chien, Chun Yi Chen, Tso-Fu Mark Chang, Hiroyuki Ito, Katsuyuki Machida, Yoshihiro Miyake, Masato Sone.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 23, 2022

Publisher

Japanese:
English:

Conference name

Japanese:	2022年応⽤物理学会春季講演会
English:

Conference site

Japanese:	神奈川
English: