Selective fabrication of Ca2NH and CaNH epitaxial thin films using reactive magnetron sputtering

Publication Information

Title

Japanese:
English:	Selective fabrication of Ca2NH and CaNH epitaxial thin films using reactive magnetron sputtering

Author

Japanese:	CHON Seoungmin, 清水亮太, Yuki Sugisawa, 小林成, 西尾和記, Markus Wilde, Daiichiro Sekiba, Katsuyuki Fukutani, 一杉太郎.
English:	Seoungmin Chon, Ryota Shimizu, Yuki Sugisawa, Shigeru Kobayashi, Kazunori Nishio, Markus Wilde, Daiichiro Sekiba, Katsuyuki Fukutani, Taro Hitosugi.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 2021

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The 82nd JSAP Autumn Meeting

Conference site

Japanese:
English: