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Publication Information
Title
Japanese:
Suppressed Drift and Low-Noise Sensor Module with a Single-Axis Gold Proof-Mass MEMS Accelerometer for Micro Muscle Sound Measurement
English:
Suppressed Drift and Low-Noise Sensor Module with a Single-Axis Gold Proof-Mass MEMS Accelerometer for Micro Muscle Sound Measurement
Author
Japanese:
大西 哲
,
柴田 浩平
,
内山 晃宏
,
町田 克之
,
緒方 大樹
,
石原 昇
,
内富 寛隆
,
Chang Tso-Fu Mark
,
曽根 正人
,
三宅美博
,
伊藤 浩之
.
English:
Akira Onishi
,
Kohei Shibata
,
Akihiro Uchiyama
,
Katsuyuki Machida
,
Taiki Ogata
,
Noboru Ishihara
,
Hirotaka Uchitomi
,
Tso-Fu Mark Chang
,
Masato Sone
,
Yoshihiro Miyake
,
Hiroyuki Ito
.
Language
English
Journal/Book name
Japanese:
English:
Japanese Journal of Applied Physics
Volume, Number, Page
Vol. 61 p. SD1028
Published date
Mar. 7, 2022
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
Official URL
10.1109/JSEN.2022.3184340
DOI
https://doi.org/10.1109/JSEN.2022.3184340
©2007
Tokyo Institute of Technology All rights reserved.