Home >

news Help

Publication Information


Title
Japanese:Suppressed Drift and Low-Noise Sensor Module with a Single-Axis Gold Proof-Mass MEMS Accelerometer for Micro Muscle Sound Measurement 
English:Suppressed Drift and Low-Noise Sensor Module with a Single-Axis Gold Proof-Mass MEMS Accelerometer for Micro Muscle Sound Measurement 
Author
Japanese: 大西 哲, 柴田 浩平, 内山 晃宏, 町田 克之, 緒方 大樹, 石原 昇, 内富 寛隆, Chang Tso-Fu Mark, 曽根 正人, 三宅美博, 伊藤 浩之.  
English: Akira Onishi, Kohei Shibata, Akihiro Uchiyama, Katsuyuki Machida, Taiki Ogata, Noboru Ishihara, Hirotaka Uchitomi, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito.  
Language English 
Journal/Book name
Japanese: 
English:Japanese Journal of Applied Physics 
Volume, Number, Page Vol. 61        p. SD1028
Published date Mar. 7, 2022 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 
Official URL 10.1109/JSEN.2022.3184340
 
DOI https://doi.org/10.1109/JSEN.2022.3184340

©2007 Tokyo Institute of Technology All rights reserved.