Y添加HfO2強誘電体エピタキシャル薄膜の電気光学効果

Publication Information

Title

Japanese:	Y添加HfO2強誘電体エピタキシャル薄膜の電気光学効果
English:

Author

Japanese:	近藤真矢, 志村礼司郎, 寺西貴志, 岸本昭, 長崎正雅, 舟窪浩, 山田智明.
English:	近藤真矢, Reijiro Shimura, Takashi Teranishi, 岸本昭, 長崎正雅, HIROSHI FUNAKUBO, Tomoaki Yamada.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 10, 2021

Publisher

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Conference name

Japanese:	第82回応用物理学会秋季学術講演会
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Conference site

Japanese:
English: