HfO2基強誘電体膜のラマン分光測定

Publication Information

Title

Japanese:	HfO2基強誘電体膜のラマン分光測定
English:

Author

Japanese:	高橋雄真, 白石貴久, 小寺正徳, 志村礼司郎, 三村和仙, 森分博紀, 田口綾子, 舟窪浩.
English:	Yuma Takahashi, Takahisa Shiraishi, Masanori Kodera, Reijiro Shimura, Takanori Mimura, 森分博紀, 田口綾子, HIROSHI FUNAKUBO.

Language

Japanese

Journal/Book name

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English:

Volume, Number, Page

Published date

Sept. 10, 2021

Publisher

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Conference name

Japanese:	第82回応用物理学会秋季学術講演会
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Conference site

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English: