Evaluation of BAW and SAW Properties of (K,Na)NbO3 Thin Films Deposited by RF Sputtering

Publication Information

Title

Japanese:
English:	Evaluation of BAW and SAW Properties of (K,Na)NbO3 Thin Films Deposited by RF Sputtering

Author

Japanese:	Kazuma Yoshizawa, Masashi Suzuki, Shoji Kakio, 伊東良晴, 舘山明紀, 舟窪浩, Tsuyoshi Wakabayashi, Kenji shibata.
English:	Kazuma Yoshizawa, Masashi Suzuki, Shoji Kakio, Yoshiharu Ito, Akinori Tateyama, Hiroshi Funakubo, Tsuyoshi Wakabayashi, Kenji shibata.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 11, 2021

Publisher

Japanese:
English:

Conference name

Japanese:
English:	IEEE IUS 2021

Conference site

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English: