Si含有DLC膜のX線吸収微細構造測定による構造解析

Publication Information

Title

Japanese:	Si含有DLC膜のX線吸収微細構造測定による構造解析
English:	Structural analysis of Si-containing DLC films using X-ray Absorption Fine Structure

Author

Japanese:	寺井響, 中西康次, 新部正人, 神田一浩, 赤坂大樹.
English:	Hibiki Terai, Koji Nakanishi, Masahito Niibe, Kazuhiro Kanda, Hiroki Akasaka.

Language

Japanese

Journal/Book name

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English:

Volume, Number, Page

Published date

Mar. 22, 2022

Publisher

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English:

Conference name

Japanese:	応用物理学会第69回春季講演会
English:	The Japan Society of Applied Physics The 69th Spring Meeting

Conference site

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English: