ダイヤモンド状炭素膜中の配向性sp2微小構造の検出

Publication Information

Title

Japanese:	ダイヤモンド状炭素膜中の配向性sp2微小構造の検出
English:	Detection of oriented sp2 nanostructure in diamond-like carbon

Author

Japanese:	神田一浩, 新部正人, 馬田直樹, 平田祐樹, 大竹尚登, 赤坂大樹.
English:	Kazuhiro Kanda, Masato Niibe, Naoki Umada, Yuki Hirata, Naoto Ohtake, Hiroki Akasaka.

Language

Japanese

Journal/Book name

Japanese:	2022年度精密工学会春季大会学術講演会要旨集
English:	Abst book: The Japan Society for Precision Engineering Spring Meeting 2022

Volume, Number, Page

Published date

Mar. 15, 2022

Publisher

Japanese:
English:

Conference name

Japanese:	2022年度精密工学会春季大会学術講演会
English:	The Japan Society for Precision Engineering Spring Meeting 2022

Conference site

Japanese:
English: